High scale accuracy up to ±1 µm

High scale accuracy up to ±1 µm

High scale accuracy up to ±1 µm

High scale accuracy up to ±1 µm

High scale accuracy up to ±1 µm

Smallest measuring step 50 nm

High scale accuracy up to ±1 µm

High scale accuracy up to ±1 µm

High scale accuracy up to ±1 µm

High scale accuracy up to ±1 µm

High resolution up to 78 nm (w/o additional electronics)

High resolution up to 0.135”